TC4钛合金表面磁控溅射 TiAlN 涂层的组织与性能

摘要

TiAlN coating was deposited on TC4 titanium alloy by magnetron sputtering technique , using TiAl alloy tar-get.Scanning electron microscope (SEM) and energy dispersing spectrum(EDS) and X-ray diffraction(XRD) were employed to analyze the surface morphology , compositions and phase structure of TiAlN coating samples .Corrosion re-sisting property and wear-resisting property of TiAlN coating samples were analyzed , too.The results show that the TiAlN coating has smooth surface and compact structure .The corrosion resisting property and wear-resisting property of TC4 are considerably improved by TiAlN coating .The wear weightlessness was reduced by 80%, salt fog corrosion resistance levels to protection grade 9.%采用TiAl合金靶材，在TC4钛合金基材表面以不同磁控溅射工艺沉积制备了TiAlN涂层。利用扫描电子显微镜（ SEM）、能谱仪（ EDS）、 X射线衍射仪（ XRD）分别分析了不同工艺制备的TiAlN涂层的表面形貌、表面成分及相结构，并对TiAlN涂层的耐蚀性、耐磨性等进行了研究。结果表明，采用磁控溅射工艺可在TC4钛合金表面制备出表面相对平整且结构致密的TiAlN涂层；沉积了TiAlN涂层的TC4钛合金试样的表面性能得到了提高，其磨损失重量和TC4钛合金基材相比降低了80％，耐盐雾腐蚀性能达到了保护级9级。