脉冲激光微细加工金刚石机理的研究进展

摘要

Diamond is an ultimate material in terms of hardness,thermal conductivity and chemical resistance,and widely used in the cutting tools,abrasives,thermal devices and optical windows.The application of pulsed or ultrashort pulsed lasers in micromachining of diamond materials can promote the utilization of diamond materials in various fields.In this paper,the advance of research on the mechanism of machining of diamond materials by pulsed laser was generalized.The pulsed laser induced diamond graphitization and la-ser ablation in the machining of diamond materials were summarized.%金刚石具有极高的硬度、导热率及优异的化学稳定性，广泛应用于切削刀具、磨具、导热器件、光学窗口等领域。脉冲激光尤其是超短脉冲激光可以对金刚石材料进行各种微细加工，是扩展金刚石材料在工业领域运用的一个重要手段，文章综述了国内外激光微细加工金刚石机理的研究进展，总结了脉冲激光在微细加工金刚石材料过程中的石墨化和材料蚀除机理。