宽量程真空规校准装置的性能研究

摘要

文章研制了一种新的真空规校准装置,复合采用了动态比对法、静态比对法和静态膨胀法,满足了拓宽量程的需求.该装置可以对量程在1×105～5×10-4 Pa范围内的各类真空规进行校准,具有结构简单、操作方便、检定效率高、实用性强的特点,尤其适用于大量常规校准.装置本底压力、压力稳定度、静态膨胀容积比等主要技术指标符合国际标准化组织和国内有关真空标准的规定.%This paper proposes a self-developed standard device for vacuum calibration,which combines three methods,that is,the direct dynamic comparison method,the direct static comparison method,and the static expansion method,to meet the requirements of a wide range. The device can be used for calibrating various types of vacuum gauges ranging between 1x105 and 5x10-4 Pa. It features simple structure,easy operation and high efficiency that is specially suitable for a large number of routine calibrations,whose main technical specifications such as background pressure,pressure stability,and volume ratio in the static expansion method are in line with the requirements in the ISO and the domestic vacuum standards.