航天器表面瞬态测温用薄膜热电偶的研制

摘要

A K-type film thermocouple is developed for measuring the temperature on the spacecraft surface. The thermocouple film is fabricated on a high temperature ceramic substrate by the RF magnetron sputtering technology. The thickness of the thermocouple contacts is in the micron grade. The K-type film thermocouple can effectively fit the spacecraft surface and be used for high-temperature transient measurement on the spacecraft surfaces. Physical test verifies that the measuring temperature of this K-type film thermocouple can reach as high as 800℃, and the relative measurement error is within ±0.5％. It can well fulfill the high-temperature transient measurement requirement of recoverable spacecrafts' surfaces.%根据航天器表面测温的需要,研制了一种K型(NiCr-NiSi)薄膜热电偶.该型热电偶采用射频磁控溅射技术在针型高温陶瓷基体上制备薄膜热电偶,其热电偶结点厚度为微米级,能够与航天器表面有效贴合,实现航天器表面的瞬态高温测量.通过物理试验验证,该型薄膜热电偶测量最高温度能够达到800℃,测量相对误差在±0.5％以内,满足返回式航天器表面高温的瞬态测温需求.