激光干涉仪环境补偿单元气压传感器检定装置

摘要

A device has been designed for verification of air pressure sensors of the environment compensator in the laser interferometers. The device, which simulates the changing air pressure environment by using the digital pressure controller and the air pressure sealing pot, has solved the problem of the signal transmission between the inside and outside of the sealing pot. The test results show that the repeatability and stability of the device are qualiifed, and the device conforms the requirements of JJG 1084-2013.%研制了一套激光干涉仪环境补偿单元气压传感器检定装置.该装置利用数字压力控制器配合气压密封罐模拟气压环境,解决了密封罐内外电信号传输问题.实验数据表明,其重复性和稳定性良好,整套装置符合JJG 1084-2013要求.