臭氧标准气体发生装置在臭氧气体分析仪检定/校准工作中的适用性

摘要

比较了不同工作原理的臭氧气体分析仪，分析了臭氧标准气体发生装置的结构原理。采用臭氧标准气体发生装置对不同工作原理的臭氧气体分析仪进行计量检定/校准，并对臭氧气体浓度检定/校准数据进行分析总结。试验结果表明，臭氧标准气体发生装置对紫外光度式臭氧气体分析仪的检定/校准有很好的适用性，但对电化学原理以及半导体气敏原理的臭氧气体分析仪并不适用，从而提出了臭氧标准气体发生装置的改造方案，使其具有更广泛的适用性。%This paper compares the different working principle of ozone gas analyzers, and analyzes the principle and structure of the ozone standard gas generating device. The ozone standard gas generating device is applied to verify/calibrate ozone gas analyzers, and the verification/calibration data of ozone gas concentration are analyzed. Experimental results show that the ozone standard gas generating device has good applicability for ozone gas analyzers with the ultraviolet photometric principle, but is not sultable for ozone gas analyzers with the electrochemical principle and semiconductor gas sensing principle. The modification sheme of the ozone standard gas generating device is put forward to improve their applicability.