温度对氮化锆膜微观性能的影响

摘要

以直流脉冲离子源辅助中频磁控溅射方式,在常温和低热条件下在玻璃衬底上制备氮化锆膜,通过扫描电镜和纳米压痕仪对薄膜的表面形貌、显微硬度、表面粗糙度的变化情况进行了研究.结果表明:增加薄膜的沉积温度,导致膜层硬度的降低；膜层中晶粒尺寸增大；微观粗糙度增加；晶粒之间的间隙明显减小；晶粒之间出现明显的镶嵌现象.%It is investigated for the changes of topogrophy, nanoindentation hardness and roughness of zirconium nitride coating thai fabricated in room temperature and heated state by ways of direct-current pulse ion source asisted middle-frequency magnetron sputtering. The results revealed that with the temperature increasing, the crystalline grains swelled and the gap between grains narrowed obviously, the nanoindentation hardness of the zirconium nitride coating decreased and the last, the nanoindentation roughness went up.