银饰表面氧化铝保护膜的防腐蚀性能

摘要

为了提高银饰的抗变色能力,采用大腔体原子层沉积设备,以Al2O3作为保护膜进行银饰的批量处理.通过在腔体内加入匀气装置,改善了腔体内膜层厚度的均匀性.通过工艺参数的改进,改善了薄膜的表面形貌.实验表明,用洗银水处理后的银饰直接进行处理,银饰表面会变黑.X射线衍射测试表明基底温度为150 ℃时,获得的薄膜为无定型结构.扫描电镜测试表明薄膜表面致密、均匀.腐蚀试验表明Al2O3膜层厚度为30 nm时,有良好的抗变色效果.光谱测试表明,镀膜后银饰的平均反射率略高于未镀膜银饰的平均反射率,镀膜后对银饰的外观基本无影响.%In order to protect silver jewelry against tarnish,Al2O3thin film was deposited on the silver jewelry by using ALD method with big chamber.The uniformity of film thickness was improved by adding device making gas uniform into the big chamber;the surface morphology of thin film was improved by optimizing process parameters. Experiments shows that the silver jewelry cleaning with silver washing liquid was black by depositing Al 2O3thin film on silver jewelry directly.XRD test shows that Al 2O3thin film is amorphous when the temperature of substrate is 150 ℃.SEM test shows that the film is dense and uniform.Corrosion test shows that the film can protect silver jew-elry against tarnish well when the thickness is 30nm.Spectrum test shows that the average reflectance is higher than uncoated silver jewelry and the film does not affect the appearance of silver jewelry basically.