溅射薄膜拉力传感器设计及性能分析

摘要

针对热真空环境下的拉力检测,研制了一种基于薄膜溅射工艺的双冗余拉力传感器.主要对溅射薄膜拉力传感器的弹性体结构和应变电阻布局进行了分析设计.针对传感器的零点输出误差设计了零点补偿电路;并对传感器的稳定性处理工艺进行了研究.最终,通过对传感器进行热真空试验,验证了该设计的合理性.实验结果表明,该拉力传感器可在-45℃～+90℃范围内正常工作,灵敏度为13.02 mV/kN,精度高于6‰.%Aiming at the tensile testing of thermal vacuum environment,a kind of dual redundant tension sensor based on sputtering thin-film process is designed.The design of the structure of elastomer and the layout of strain resistance were mainly introduced.The circuit of zero compensation and stability process is also researched.Finally,through the thermal vacuum test,the environmental adaptability of the tension sensor is verified.The experiment data proves that the tension sensor can work within-45 ～90 ℃,sensitivity is much better than 13.02 mV/kN and precision is higher than 6‰.