Preparation and characterization of transparent conducting Zn-Sn-O films deposited on organic substrates at low temperature

摘要

Transparent conducting Zn-Sn-O films were deposited on Polypropylene adipate thin-film substrates at Iow temperature by r. f. magnetron sputtering. The structural, electrical and optical properties of the deposited films were investigated. All the obtained films are of amorphous structure and have a very good adhesion to the substrates. The resistivity, carrier concentration and Hall mobility of the film are 1.3× 10-2 Ω @ cm, 4.1 × 1019 cm-3 and 12.4 cm2 @ V-1 @ s-1, respectively. The transmittance of the film reaches 82%.