Two-Dimensional Simulation of a Dual Frequency Sheath Near an Electrode with a Cylindrical Hole

摘要

The characteristics of a collisional dual frequency(DF)sheath near an electrode witha cylindrical hole are studied by utilizing a two-dimensional model which includes time-dependentfluid equations coupled with the Poisson equation and an equivalent-circuit model.The effects ofthe gas pressure on the two-dimensional profiles of the potential,electric field,ion fluid velocityin a DF sheath are investigated.The simulation results show that the cylindrical hole on theelectrode has a significant influence on the DF sheath structure,i.e.,the sheath profile tends towrap around the contour of the hole feature.Moreover,it is shown that the structure of theDF sheath is different from that of a single frequency(SF)sheath because the profile of the DFsheath is modulated by the combination of the high and low frequency sources.In addition thecharacteristics of the DF sheath are obviously affected by the collisional effects in the DF sheath.