等厚干涉实验中缺陷检测的数值模拟

摘要

利用数值方法研究了等厚干涉实验中平面玻璃存在凸凹缺陷时的干涉条纹，给出了不同缺陷尺寸、高度或曲率情况下的条纹变化性质，讨论了利用干涉图像进行缺陷检测的方法。该研究给出等厚干涉实验中的典型问题的数值求解办法，结果形象直观，便于理解。%T he change of the interference fringes caused by the defect in the plain glass in equal‐thickness interference experiment was numerically studied .The properties of the fringe patterns for different defect size ,height and curvature were shown and the method of defect detection based on the interference fringe was discussed .The study gave a numerical solution of a classical problem in the e‐qual thickness interference experiment .The results were intuitive and easy to understand .