电化学电镀ZnO对石墨烯基NO2气敏传感器的气敏性影响

摘要

通过低压化学气相沉积的方法制备了单层石墨烯,用电化学电镀的方法在石墨烯表面沉积了氧化锌纳米层,制作出一种新的、简单、高效的掺杂氧化锌纳米层的石墨烯基气敏传感器,并研究了本征的和电镀氧化锌的石墨烯基气敏传感器对不同体积分数的NO2气体的响应特性和恢复特性.实验表明:在工作电压-0.5V,时间300s的条件下电镀ZnO的石墨烯基传感器的气敏性最好,其对10ppm NO2的灵敏度为-22.126％(本文中定义灵敏度为测量电阻R与本征电阻Ro的差值与本征电阻的比值,故为负值),是本征石墨烯传感器的3.85倍,且响应的最低浓度达到0.5ppm(其灵敏度为-0.786％).%A new,simple,high-efficiency single-layer graphene-based gas sensor is fabricated with the treatment of electrodeposition of ZnO on graphene,in which graphene is fabricated with low pressure chemical vapor deposition (LPCVD).Response and recovery characteristic of NO2 gas sensors based on the pristine and ZnO-doped graphene are investigated.Experiment shows the best gas-sensitivity of ZnO-doped graphene-based gas sensor can be obtained at 300s when the electrodeposition potential is-0.5V.Its sensitivity to 10ppm NO2 is-22.126 ％,which is 3.85 times more than the sensitivity of pristine graphene-based gas sensor.And the limit of volume fraction of NO2 is 0.5ppm (the sensitivity is-0.786％).