计算机辅助检测光学薄膜参数特性的一种方法探讨

摘要

A general calculating method of optical character of optical thin films,namely characteristic matrix method is stated concisely. By taking the method of inverse operation and the computer-aided technique, the testing of thickness of optical thin films is completed firstly in China. Meanwhile, this method is also applied to the process of this coated film. The related computing formula and the programming flow chart are introduced and the experimental data is also depicted. The conclusion from our demonstration metioned above is given at last.%简要的叙述了光学薄膜光学特性的通用计算方法，即特征矩阵法。采用这种方法的逆运算形式，应用计算机辅助计算和检测技术，在国内首次完成对多层光学薄膜镀膜后或制备过程中各膜层光学厚度的检测。同时介绍了有关的计算公式和计算程序流程，最后给出试验数据结果和结论。