一种新型光纤传感器在精密产品加工中的应用研究

摘要

利用所研制的新型反射式光纤传感器对精密产品加工中的小台阶、沟槽等进行了测试研究。测试系统充分发挥了激光光纤传感测量方法的突出优点,实现对精密产品的非接触、快速地检测。传感器的高度分辨力可达0.4μm,定位精度可达±2μm。%Based on the newly developed laser optical fiber sensor, the small step products and grooves machined by precision processing were experimentally measured according to the laser reflex principle. By making full use of the outstanding merits of the laser optical fiber sensing technology, a non-contact, high-speed inspection for the precision products is realized. The longitudinal resolution of the sensor can reach 0.4μm, and the positioning accuracy is better than ±2μm.