用体硅微加工工艺实现的微纳电械系统

摘要

@@ 1 IntroductionrnMEMS (Micro ElectroMechanical System) based on semiconductor microfabrication plays important roles for example in the periphery of IT systems. NEMS (Nano ElectroMechanical System) contains nano-scale structures. Sophisticated and high performance systems based on the MEMS and the NEMS have been developed. Packaging and electrical interconnection play an important role in realizing practically applicable systems[1].