For more than 20 years,capillary optics have been used in X-ray analyties.During this time the technology of manufacturing capillary optics passed a considerable development.Whereas in the beginning of 1990s assembled capillary optics were tested in research laboratories,at present monolithie polycapillary optics are widely used in commercial X-ray analytical instruments.These optics show capillary sizes in the micrometer region and their physical behaviour can be described in terms of geometrical optics using ray tracing programs.Recently capillary channel sizes of 200 nm and below were realised due to further improvement of the manufacturing technology for polycapillary structures.At such small structures,the appearance of wave effects for X-ray radiation was observed.Finally,application examples for capillary optics in micro X-ray fluorescence analysis and micro X-ray diffractometry are presented.%毛细管光学元件在X射线分析中的应用已有20多年的历史,在这段时间里,毛细管光学元件的制作技术发生了很大的变化.上世纪90年代初,使用的是组装的毛细管光学元件,目前,集成的多通道毛细管光学元件已广泛地应用于市场销售的X射线分析设备中.这些元件的毛细管直径在微米量级,其光学性质可以根据几何光学的光线追迹计算进行描述.最近,由于多通道毛细管制作技术的改进,已成功制成了200 nm及以下通道尺寸的毛细管光学元件.在这样小的通道尺寸下,观察到了X射线辐射的波动效应.最后文章介绍了毛细管光学元件在X射线微荧光分析和微衍射方面的应用.
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