钢圈反射式光栅信号的补偿

摘要

In order to improve the measuring accuracy of a steel ring reflective grating,a grating signal compensation system is designed. The system is used to compensate the signal amplitude, DC voltage and the phase of the grating, respectively, for which two grating signals have a better orthogonality. First, according to the sampling method for steel ring reflective grating signals, an electronic processing system is created. And then several compensation algorithms are established aiming at the signal amplitude,DC voltage and the phase. By taking the steel ring reflective grating with 8 192 lp/mm as a platform and the results of testing precision as a basis of adjudication,the proposed signal compensation system is verified. The results show that the precision compensated has been improved by 2. 28" with an increasing magnitude of 50%. Obtained results prove that the signal compensation system is feasible.%为了提高钢圈反射式光栅的测量精度,设计了光栅信号补偿系统,分别对光栅信号的幅值、直流电平和相位进行了补偿,补偿后两路光栅信号的正交性得到了改善.首先,根据钢圈反射式光栅提取信号的方式建立光栅信号电子学处理系统.然后,分别从幅值、直流电平和相位等3方面提出系统的补偿算法.以8 192 lp/mm的钢圈反射式光栅为平台,以实际的精度检测结果为评判依据,对提出的信号补偿系统进行了实验验证.结果表明,补偿后的光栅精度比补偿前提高了2.28″,提高幅度达到50％.实验结果验证了光栅信号补偿方案的可行性.