核孔膜的非常规蚀刻法

摘要

不对称蚀刻法的分析表明，在灵敏度不变时可以得到小孔径核孔膜。实验显示，由于孔径不均匀现象的制约，核孔膜的孔径可减小到1/2。温度梯度蚀刻法的分析表明，导通时间的减小与膜两面的温度差成正比，在实际条件下孔径减小到1/5。模拟计算表明，采用该方法可得到柱状孔核孔膜，但蚀刻过程很难控制。%An analysis of asymmetric etch demonstrated that the nuclear track membranes can be prepared with smaller pore size than that with the normal etch. The experiment showed that the pore size can be decreased to 1/2 of the normal size by this method. The analysis for an etch method with temperature gradient showed that the pore size decreased with the increasing temperature gradient and could decrease to one-fifth of the normal size under the practical conditions. The computer simulation showed that the nuclear track membranes could prepared with cylinder pore by this method but it was difficult to control the etching process.