一种基于实时数字图像处理的同步辐射微探针自动化扫描新方法

摘要

Background: Automation is a trend of the hard X-ray microprobe technology especially for the synchrotron radiation application where the beamline time is highly demanded. Purpose: In order to realize the synchronous radiation microprobe fluorescence automation scanning at Shanghai Synchrotron Radiation Facility (SSRF) hard X-ray microfocus beamline (BL15U1), a real-time digital image processing based method is studied and developed in this paper. Methods: The proposed system consists of a high sensitivity & high frame rate Charge Coupled Device (CCD) imaging system and a XPS motion control system. Sample alignment is integrated into the microprobe scanning functions which allow users to directly click the interested position in the image to moves the sample into the X-ray beam path. It intelligently aligns the specified point on sample surface to the X-ray beam spot. While doing the microprobe scanning, users can specify any interested region on sample surface and set the experimental scanning parameters (time range, scanning steps, and so on), then the system automatically generates a XPS motion controller configuration file for microprobe scanning, and drives the motors to implement scanning. Results: Experimental testing showed that the fluorescence mapping of standard gold mask was obtained by automation scanning and could quickly match the region of interest (ROI) on the CCD image. Conclusion:The new automatic system can improve the microprobe scanning significantly, and the software interface is much more user-friendly.%在上海光源硬X微聚焦及应用光束线站(BL15U1)上实现了一种基于实时数字图像处理的同步辐射微探针自动化扫描方法。该方法采用高灵敏度、高帧率的数字电荷耦合器件(Charge Coupled Device, CCD)显微镜实时成像，通过对显微镜系统和X光微米探针系统的坐标转换，使用户在图像空间直接点击到感兴趣的位置后，样品台就自动将该点移入光路。在设定好扫描时间、扫描步长等必要的实验参数后，只需要用鼠标在图像空间圈出需要扫描的区域，系统将自动生成 XPS 运动控制器的运动配置文件，并驱动电机运动，对该区域进行微束荧光扫描成像。结果表明，该方法不仅可以提高同步辐射机时的使用效率，而且可以满足微区研究人员快捷、方便的自动化操作需求。