论述了透射式特征X射线测厚原理,并对样机的硬件组成特征X射线发生装置、X射线探测器、数据处理器和监控软件进行了介绍.通过对测厚样机的实验测试,结果显示测量较薄物质时测厚仪反应灵敏,测量精度较高,相对误差在±5%以内,达到设计要求.%The theory of transmission characteristic X- ray measurement thickness are discussed,hardware including equipment for characteristic X - ray producing, X - ray detector, data processor and monitoring software are introduced. Properties of the thickness gauge are tested, results show thickness gauge is sensitive, higher accuracy when tested material is thin, relative error within 5 ％, according with design request.
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