缓冲化学腐蚀对高纯铌材剩余电阻率的影响

摘要

文章主要研究了缓冲化学腐蚀对高纯铌材剩余电阻率的影响，在使用氢氟酸（40％）∶硝酸（65％）∶磷酸（85％）的混合酸体积比为1∶1∶2的情况下，随着腐蚀温度升高，剩余电阻率会降低；腐蚀时间长导致酸液温度升高，也会使高纯铌样品的剩余电阻率降低。选择合适的工艺参数，对正确判断铌材性能和适当处理铌材具有重要意义。%Using a mixed acid composed of hydrofluoric acid (40%),nitric acid (65%)and phosphoric acid (85%)with a volume ratio of 1:1:2,the paper highlighted the effects of buffered chemical etch on residual resistivity ration (RRR)of high purity niobium.RRR decreased with etching temperature increasing,so did it with etching time increasing which led to the temperature of acid liquor rising.The paper concluded that selection of technical parameters plays a key role in properly estimating and treating niobium.