用于热障涂层检测的柔性平面电容传感器

摘要

The principle of the planar capacitance sensor was analyzed in this paper,and the sensor structure was optimized with COMSOL finite element simulation software.The flexible planar capacitance sensor used for defect detection of thermal barrier coatings in engine blades was fabricated and the performance of the sensor was tested. The testing results show that the flexible planar capacitive sensor can detect the defects in non-metallic materials effectively.%对用于热障涂层缺陷检测的平面电容传感器的工作原理进行了分析，利用 COMSOL有限元仿真软件对传感器结构进行了优化设计，制备了可用于发动机叶片热障涂层缺陷检测的柔性平面电容传感器，并对传感器的性能进行了测试。测试结果表明，柔性平面电容传感器可以有效地检测出非金属材料的缺陷。