陶瓷涂层厚度的水浸超声谐振测量

摘要

采用水浸超声谐振方法,结合全相位频谱分析技术,对304不锈钢基体上的厚度在1 mm以下的氧化铝陶瓷涂层的厚度进行测量.结果表明:基于全相位频谱分析技术的水浸超声谐振方法测得的涂层厚度与实际厚度的相对误差小于2%,可以较为精确地实现对氧化铝涂层厚度测量.%Water immersion ultrasonic resonance method was used, together with the all-phase spectrum analysis (APSA) technique, to detect the thickness of the thin layer of alumina ceramics on the 304 stainless steel substrates in the thickness less than 1 mm.The results show that the relative error of coating thickness by APSA-based ultrasonic resonance technique method is less than 2%, which means this method can measure the thickness of thin alumina layer more accurately.