真空感应熔炼工艺在太阳能级多晶硅制备中的应用探索

摘要

为了探讨真空感应熔炼工艺在冶金物理法制备太阳能级多晶硅生产中的应用效果，利用真空熔炼设备，对硅料在不同真空度条件下进行制备试验，对比试验前后原料和成品中的P元素以及几种金属元素的化验结果可知，在冶金物理法制备太阳能级多晶硅中真空感应熔炼工艺完全可以起到降低杂质含量，提高硅晶体纯度的作用．%In order to research the effect on producing solar grade polycrystalline silicon, using vacuum induction melting process, the tests under different vacuum degree have been studied by vacuum induction melting equipments. According to ICP-OES results on phosphorus and several metal elements of raw materials and products, vacuum induction melting process can be used for solar grade polycrystalline silicon in "physical metallurgy" to improve the purity of silicon effectively.