钢板上沉积锌合金镀层的PVD试验设备研发

摘要

A multi-functional laboratory equipment for zinc-alloy coating deposited by PVD(physical vapor deposition) was developed.Zinc alloy coating deposited by evaporation or magnetron sputtering can be realized and annealing can be car-ried out as well.Functions,structure and process parameters were described.The experiments showed that the laboratory equipment can be used to deposit innovative zinc alloy coating,it plays a great role in deepening performance research of zinc alloy coating and promoting innovative corrosion-resistant coating development.%开发了一种采用物理气相沉积(physical vapor deposition,简称 PVD)技术沉积锌合金镀层的多功能试验设备,该设备集成了磁控溅射、蒸镀及退火功能；同时,描述了其功能、组成及工艺参数,可用于制备新颖的锌合金镀层,对于深化锌合金镀层的性能研究和促进钢板用腐蚀防护镀层新材料的研发具有重要意义。