消应力消偏振胶合棱镜二向色膜的设计与制备

摘要

According to polarization effects of the thin film,by using the professional thin film design software Essential Macleod,finished the depolarization dichroic coating design for the DVD prism,and implemented optical controlled technol-ogy to accurately control the film thickness,successfully manufactured the depolarization beam-splitting prism that satisfied the customer requirement.The thin film with large remained stress is easily to come off,which made the thin film lose all function.In order to eliminate the stress on the thin-film,a kind of design solution was put forward which not only based on the matching relationship between the coating materials,but also on the manufacturing process,combined these two aspects with controlling the stress of the thin film,and then reviewed the effects,checked change before and after the coating which showed the change of the stress of the thin-film.During the manufacturing process,designed and produced adj ustable tool to change the clear aperture of the thin-film,and also adj usted to achieve the high precision clear-aperture requirement through standard blocks.This paper gave the design of depolarization thin film of the prism and its test results.%根据薄膜的偏振效应，运用Essential Macleod光学薄膜设计软件，完成 DVD棱镜中消偏振二向色膜的设计，并采用光控法精确控制膜层厚度，制备出了满足客户要求的消偏振分光棱镜。残余应力大的薄膜容易产生脱膜现象，使得薄膜失去所需功能。为了消除薄膜应力，从膜料之间应力匹配关系及制备工艺2个方面，提出了控制薄膜应力的设计思想，并对其影响进行了讨论，利用镀膜前后光圈变化来反映膜层应力的大小。制备过程中，通过设计制作可调工装来改变镀膜有效孔径，通过调节标准块来满足非常严格的镀膜有效孔径要求。本文给出了该棱镜的消偏振膜系的设计和试验结果。