金属掺杂类金刚石纳米复合涂层的制备、结构与性能∗

摘要

金属掺杂类金刚石纳米复合薄膜(Me-DLC膜)具有诸多优异的力学、摩擦学、电学和生物学特性，尤其因其在降低残余应力方面的显著功效，近年来成为新型碳功能材料领域的研究热点和重要分支。主要综述了Me-DLC膜的常用制备技术，对金属掺杂导致类金刚石(DLC)薄膜的组分、结构和性能的变化规律进行了分析，阐述了金属掺杂导致的薄膜微结构演化与硬度、摩擦因数和残余应力之间的作用关系，最后提出了发展Me-DLC纳米复合薄膜的一些关键研究问题。%Recently,the metal doped diamond-like carbon (Me-DLC)nanocomposite films have drawn more attention due to their superior mechanical,tribological,electrical,and biological compatibility properties comparing with the pure DLC films.The typical synthesis technology,correlation among film composition,microstructure and properties are re-viewed.Particularly,the effect of microstructure evolution caused by the incorporated metal atoms on the hardness,friction coefficient,and residual stress of Me-DLC nanocomposite films are focused.The solid solubility of metals in DLC films de-posited by various methods is also referred,which would help to understand the microstructure evolutions due to the doped metals.The present problems and the future research issues have also been pointed out at last.