高端MEMS固体波动陀螺的发展与应用

摘要

The developing progress of solid wave gyroscope was summarized, and evolution from solid wave gyroscope to MEMS gyroscope was analyzed. This paper aims at forecasting the developing direction of MEMS gyroscope, promoting the investigation and implication of our national advanced MEMS ring solid wave gyroscope according to analyze the evolu-tion and researching progress of MEMS ring vibrating gyroscope.%总结了固体波动陀螺的发展历程,分析了从固体波动陀螺到MEMS陀螺的演化过程.通过对MEMS谐振环陀螺的演化与研制历程进行分析,预测未来高端MEMS陀螺发展方向,推动我国高端MEMS环形固体波动陀螺的研究与应用.