Air-coupled piezoelectric micromachined ultrasonic transducers for surface stain detection and imaging

摘要

This paper proposes an air-coupled piezoelectric micromachined ultrasonic transducer(PMUT)for detection and imaging of surface stains.A 508 kHz PMUT array is designed,fabricated,and characterized in terms of its electrical and acoustic properties,and it is used in a pulse echo validation test.Imaging of stains on metal blocks is successfully demonstrated.Compared with existing optical methods for stain detection,the proposed approach can work in a dark environment without color requirements.This work provides a new and promising route for the development of miniaturized stain detection systems.