To study the effect of acid treatment on the sensitivity of carbon nanotubes (CNTs) gas sensors,a quartz crystal microbalance (QCM) volatile organic compounds (VOCs) gas sensor based on multi-wall CNTs (MWCNTs) was fabricated.The sensitivity with acid treatment was much higher than that of the sensor without acid treatment,which is explained by capillary condensation and Kelvin equation.Moreover,the sensor sensitivity for different VOCs vapors (toluene,ethanol and acetone) was compared,and the results indicate that the sensor sensitivity is determined by the saturated vapor pressure of VOCs vapor,which can be similarly explained by capillary condensation and Kelvin equation.%为分析酸处理过程对石英晶振型碳纳米管(C NTs)有机(VOCs)气体传感器灵敏度的影响,制作了一种多壁碳纳米管(MWCNTs)石英晶振式VOCs传感器.发现酸处理可以明显提高传感器灵敏度,利用毛细凝聚原理与开尔文公式对上述实验现象进行了分析.另外,比较了传感器对不同有机气体(甲苯、乙醇和丙酮)的灵敏度,研究结果表明传感器灵敏度与气体饱和蒸汽压有关,同样,该实验现象可利用毛细凝聚原理与开尔文公式来解释.
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