石英玻璃的磁性磨粒光整加工试验

摘要

针对石英玻璃表面光整难度大的问题,探讨了磁性磨粒光整加工(MAF)的加工工艺及加工效果.选用金刚石磨粒制备的非固结磁性磨料,对石英玻璃进行光整加工试验.在其他参数不变的情况下,得到最佳主轴转速为960 r/min,最佳加工间隙为2 mm.研究分析了加工时间和前道工序的表面粗糙度对工件表面粗糙度的影响规律,并得到表面粗糙度Ra、Rz随时间变化的趋势图.在此条件下,经4种不同粒度金刚石磨料依次加工,最终工件表面粗糙度Ra由0.325 μm下降到0.016 μm,Rz由2.69 μm下降到0.12 μm.结果表明:MAF对石英玻璃具有较好的光整效果,为石英玻璃的表面光整提供了一种新工艺.%Regarding the problem of difficult machining of quartz glass,the processing technology and effect of magnetic abrasive finishing(MAF) were discussed.The unconsolidated magnetic abrasive of diamond was used for quartz glass finishing by MAF.And the optimal parameters were obtained as follows: spindle speed 960 r/min,and machining gap 2 mm.The effect of machining time and initial state on surface roughness is studied and analyzed.Trend charts of variation of surface roughness Ra and Rz values with machining time were obtained.Under these conditions,Ra reduced from 0.325 μm to 0.016 μm and Rz reduced from 2.69 μm to 0.12 μm,after finished by diamond abrasives of four different particle sizes successively.The experimental results indicate that a perfect finishing effect can be achieved for quartz glass by MAF.The method provides a new process for finishing the surface of quartz glass.