同轴倾斜转镜式傅里叶变换红外光谱仪的系统误差容限研究

摘要

针对具有同轴倾斜转镜式结构的新型傅里叶变换红外光谱仪进行了研究,该结构主要通过绕轴转动的倾斜反射镜组合和固定反射镜转折光路,产生连续变化的光程差,形成连续变化的干涉光强度.为了尽可能获取可靠的干涉光强度数据,获得准确的光谱信息,需要对系统的潜在误差进行研究,分析误差的来源和影响,确定系统的误差容限.通过模拟分析的手段,对倾斜反射镜组合和固定反射镜的误差进行了研究,确定了主要的误差来源、误差影响和误差允许范围,对系统误差容限形成了全面的认识.在此基础上,可以为同轴倾斜转镜式傅里叶变换红外光谱仪的制造和装配提供具体的数据参考.%A new kind of Fourier transform infrared (FTIR) spectrometer based on a couple of coaxial rotary and inclined mirrors is studied.It causes the continuous change of optical path difference (OPD) with two coaxial rotary and inclined mirrors and two fixed mirrors which turn the optical paths to generate the continuous change of the interferential intensity.To obtain reliable interferogram data and accurate spectra, the study on error is necessary.The tolerance can be determined by analyzing the sources and influence of error.Simulation was carried out to study the error caused by the inclined mirrors and the fixed mirrors, and the sources, the influence and the maximum range of error were obtained.The result can be used to guide the fabrication and assembly of the rotary FTIR.