基于模糊逻辑决策的Interbay系统晶圆卡运输成本模型

摘要

To obtain better complex schedule performances of the Interbay material handling system in 300mm semiconductor manufacturing systems (SMSs), a fuzzy logic decision-making based wafer lot' s transportation cost model for the Interbay material handling system is proposed. With experimental data from an Interbay material handling system of 300mm SMSs, the proposed fuzzy logic decision-making based wafer lot' s transportation cost model is compared with the traditional wafer lot' s transportation cost model with constant weight coefficients. The results demonstrate that the proposed wafer lot' s transportation cost model has better comprehensive schedule performances of the Interbay material handling system and SMSs than the traditional wafer lot' s transportation cost model.%为了提高晶圆制造Interbay物料运输系统的多目标调度性能,提出了一种基于模糊逻辑决策的晶圆卡运输成本模型.基于300mm晶圆制造系统数据进行仿真实验并与固定权重的晶圆卡运输成本模型进行比较,结果表明采用该模型能获得更优的Interbay系统多目标调度性能,表明论文提出的基于模糊逻辑决策的晶圆卡运输成本模型是有效的.