磨料与工件对集群磁流变效应抛光垫磨粒“容没”效应的影响

摘要

磁流变液在外加磁场的作用下，在抛光盘与工件表面之间形成粘弹性集群磁流变效应抛光垫产生磨粒“容没”效应，本文以加工工件表面粗糙度Ra/Rv与表面形貌为指标，通过在磁流变抛光液中掺杂粗大磨粒对无表面损伤的单晶硅片、K9光学玻璃、碳化硅晶片进行抛光实验，讨论磨料种类、工件材质对群磁流变效应抛光垫磨粒“容没”效应作用的影响。实验结果表明：集群磁流变效应抛光垫对金刚石与氧化铈磨粒均表现出显著的“容没”效应效果。当抛光单晶碳化硅晶片时，相比金刚石磨粒，集群磁流变效应抛光垫“容没”氧化铈磨粒的效果更佳。而当工件的硬度接近主体磨粒的硬度时，集群磁流变效应抛光垫将表现出更加显著的“容没”效应效果。%Under the magnetorheological effect ( MR-effect) , MR fluid with abrasives behaves as Bingham liquid, and a viscoplastic cluster MR-effect pad is formed pad between the surface of polishing plate and workpiece. A model for accommodate-sinking effect ( AS-effect) of MR-effect pad is presented based the polishing process. A series of experiments were performed to study the influence of abrasive kind and work-piece material on AS-effect, and the surface roughness and morphology of the machined surface were inves-tigated. Experimental results found MR-effect pad has a prominent AS-effect on abrasives and the machined surface damage caused by non-uniformity of abrasive particle size can be reduced or eliminated. It is indica-ted that a better AS-effect of MR-effect pad on rogue particles when the hardness of polished workpiece ma-terial is close to the hardness of main abrasives.