激光冷却器高精度表面的超精密加工工艺研究∗

摘要

冷却器是重要的换热、冷却设备，在激光行业常用的是循环水冷却器，是激光系统中必不可少的部件之一。工件表面质量决定了产品的冷却性能、温度控制精确度、发热元件的寿命等。文章在无应力装夹、刀具选择、加工参数选择、冷却润滑条件、进刀方式等方面优化了切削工艺参数，实现了超精密冷却器高精度表面质量的加工。%Cooler is an important heat exchanging, cooling device. Circulating water cooler that is one of the indispensable components for laser systems is widely used in laser industry. The surface quality of the cooler determines the cooling performance, temperature controlling accuracy and the service life of heating element. In this paper, according to the optimal cutting parameters such as low or free stress installation, tool selection, optimal cutting parameters, cooling/lubrication conditions and feed mode, the ultra-precision surface quality of high precision machining on the cooler was realized.