硅压阻式压力传感器的零点温度漂移和灵敏度温度漂移是影响传感器性能的主要因素之一，如何能使该类误差得到有效补偿对于提高其性能很有意义。通过对硅压阻式压力传感器建立高阶温度补偿模型进行温度误差补偿是一种有效的方法，并在该模型基础上给出了拟合系数计算方法，并用Matlab GUI软件来实现温度补偿系数计算，进而实现传感器输出的动态温补，达到了很好的输出线性性。实验结果表明，补偿后传感器输出的非线性误差小于0.5% F.S。% The thermal zero drift and thermal sensitivity drift of piezoresistive pressure sensor are the main factors of affec⁃ting the performance of sensors,so how to effectively compensate this kind of error to improve its performanc is significative. It’s an effective method to establish higher⁃order temperature compensation model of silicon piezoresistive prossure sensors and com⁃pensate temperature error. A fitting coefficient calculation method is put forward on the basis of this model. The calculation of temperature compensation was realized with Matlab GUI,and then the dynamic temperature compensation of the sensor output was realized. The good output linearity performance was achieved. The experimental results show that the nonlinearity error of compensated sensor output is less than 0.5%.
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