The principle of compensation based on two compensation structures was discussed in this paper,and the graphics of compensation was designed and experimented with KOH etchant. The compensation effect of the convex corner according well with expected.%针对两种补偿结构探讨了硅的凸角腐蚀补偿原理,设计了补偿版图,并在KOH腐蚀液中进行实验验证,获得了好的直角凸面补偿效果.
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