CV测试中的一种异常现象及解决方法

摘要

针对半导体CV测试中出现的一种曲线异常现象进行分析,找出问题所在,最终得出解决的办法.并提出一些有利于改进CV测试效果的建议.%The analysis is performed for an abnormal phenomena of curve in the bias-temperature step of CV measure,and the reason for the problems is found.The solution is applied to improve the effect of CV measure.