SPC 研究及其在芯片制造工艺中的应用

摘要

统计过程控制（SPC）技术是集生产技术与科学管理于一体的现代工艺质量管理技术。在企业生产过程中，SPC 是生产过程控制的有效手段和工具。SPC 作为一种过程控制方法，运用数理统计概率论的原理，应用统计方法对过程中的各个阶段进行监控，可及时发现生产过程中的异常情况。%SPC Technology,integrating production technology and scientific management,is a modern process quality management technology.In the enterprise production process,SPC is an effective means and tools for production process control.As a kind of process control,it uses the principles of probability theory and mathematical statistics.The application of statistical methods is used to monitor the various stages of the process to find abnormal phenomena in time in production process.