腐蚀工艺在石英晶体谐振器生产过程中的应用

摘要

晶片腐蚀是石英晶体谐振器生产过程中不可缺少的工序。采用不同的腐蚀工艺参数，例如腐蚀量大小、腐蚀液的温度、不同的腐蚀方法，均会对晶体谐振器参数产生不同的影响。简要介绍了石英晶片的腐蚀工序作用、主要参数和腐蚀工艺的步骤对晶体谐振器参数的影响。%Corrosion is a wafer production process quartz crystal resonator indispensable step. Etching processes using different parameters, such as the size of the etching amount, the temperature of the etching solution, various etching methods are crystal resonator parameters will produce different effects. Impact of the steps outlined quartz wafer etching process, the main parameters and corrosion processes of crystal resonator parameters.