非接触式滚动直线导轨精度测量装置

摘要

This paper describes the precision measuring device for the linear rolling guide with the non-contact type is mainly used for the precision (flatness) detection with the motion of the linear rolling guides, but also can measure the distance between the groove and bottom surface of the linear rolling guide. This paper is briefly introducing the precision project and its traditional measurement methods of the linear rolling guide, and makes the explain in details for the new non-contact measuring principle dynamic structure of the device, the measurement methods and this machine, finally it also compares the technical features both about the old and new methods.%非接触式滚动直线导轨精度测量装置主要用于滚动直线导轨运动精度（平直度）的检测，同时也可以测量导轨沟槽到导轨底面的距离。对滚动直线导轨要测量的精度项目以及其传统的测量方法作了简单介绍，对新的非接触式动态测量装置的结构原理、测量方法以及实现这一测量方法的机台作了详细说明，最后还在技术特点方面对新旧两种方法作了比较。