超高硬度纳米复合薄膜Ti-Si-N结构的研究进展

摘要

综述了Ti-Si-N超硬纳米复合薄膜结构形式的研究进展.介绍了研究者对Si原子在Ti-Si-N中形成的晶界是否为晶态的认识与研究,阐述了Si原子在Ti-Si-N中所形成的界面结构形式的研究现状以及Ti-Si-N薄膜沉积过程中的形成机制,并展望了Ti-Si-N超硬纳米复合薄膜今后的研究方向.%The research development of the super hard nano composite Ti-Si-N coating structure is reviewed. The crystalline or amorphous of Si in Ti-Si-N coating is introduced. The recent studies of interfaces structure in Ti-Si-N coating and the formation mechanism of Ti-Si-N are summarized. Based on the summary, research direction of nano composite Ti-Si-N coating in the future are prospected.