CuAlO2 (CAO)透明薄膜是一种铜铁矿结构p型直接带隙透明氧化物薄膜,该型薄膜样品的可见先透射率高达80％.随着基片温度的升高,薄膜的透射率减小；随着工作压强和靶基距的增大,薄膜的透射率增大；随着退火温度的升高,薄膜的透射率增大,有“蓝移”现象；随着溅射时间的延长,薄膜的透射率减小,也有“蓝移”现象.目前,利用该薄膜已成功制得了透明的臭氧传感器和透明光电板等器件,显示了CAO的应用前景.%The CuAlO2 thin film is a delafossite structure, p-type and directly band-gap electrical conductivity transparent oxide thin film, spectral analysis result indicate that the transmittance of this kind of thin film could be more than 80%. The transmittance decreases when the substrate temperature increases. The transmittance increases when the work pressure and distance of target increase. The transmittance increases when the annealing temperature rises, and the absorbance edge move toward the short wavelength. The transmittance decreases when the sputtering time increases, and the absorbance edge move toward the short wavelength too. Up to now, the ozonoscope and transparent photoelectricity sheet have been manufactured successfully, which shows a straightforward application of the CAO.
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