Assembly monolayer ordered arrangement of PS microspheres (polystyrene spheres) were prepared on p-type Si substrate by spin-coating, on which ZnO seed layer was spin-coated. PS template was washed, then periodical ZnO seed array was got, on which ZnO nanorod can grow by hydrothermal. X-ray diffraction (XRD), scanning electron microscopy(SEM) were used to characteriz the sample. The results show that ZnO thin films were columnar ZnO array and the ZnO nanorod preferential growth along the c axis. Using 150W xenon lamp as light source to radiate Si/ZnO heterojunction solar cell devices, and voltage characteristics were tested by multimeter. For the best sample, the conversion efficiency of 1. 23% and the fill factor of 62% are obtained.%在洁净的p型Si片上通过旋涂法组装了单层有序排列的聚苯乙烯微球(Polystyrene spheres,PS)阵列模板,然后在PS模板上旋涂1层ZnO先驱薄膜,清洗掉PS模板,制得周期性ZnO先驱薄膜点阵,再通过水热法生长ZnO纳米棒.采用X射线衍射(XRD)、扫描电镜(SEM)对样品进行表征,结果显示ZnO薄膜为柱状ZnO阵列,基于Si衬底沿c轴择优生长.以150W氙灯为模拟光源,照射Si/ZnO异质结太阳能电池器件,通过万用电表测试其伏安特性.性能最好的样品的光电转换效率为1.23％,填充因子为62％.
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