异丙醇溶液中电化学法制备类金刚石薄膜的研究

摘要

)Diamond-like carbon(DLC) films were deposited by liquid electrochemical technique using 2-propanol as electrolyte at low temperature (60~70℃). The morphology and microstructure of the films were analyzed by scanning electron microscopy( SEM), atomic force microscopy(AFM), Raman spectroscopy and Fourier transform infrared spectroscopy(FTIR). The characterizations suggested that hydrogenated DLC films with smooth and uniform surface and significant sp3 carbon were successfully deposited.%采用电化学方法,以分析纯的异丙醇溶液作为碳源,低温(60～70℃)常压条件下,在(100)硅片上沉积了类金刚石薄膜.利用扫描电子显微镜( SEM)、原子力显微镜(AFM)、拉曼光谱仪(Raman)和傅里叶变换红外光谱仪(FTIR)表征了薄膜的表面形貌和结构.结果表明,电解异丙醇溶液可以获得表面均匀致密且sp3碳含量较高的含氢类金刚石薄膜.