阳极氧化法制备TiO2和Al2O3有序多孔阵列

摘要

采用阳极氧化法制备了TiO2和Al2O3有序多孔阵列,并通过X射线衍射(XRD)、场发射扫描电子显微镜(FESEM)、莱茨光学显微镜对制备的TiO2和Al2O3有序多孔阵列进行表征.结果表明,随着氧化电压的增大,TiO2和Al2O3纳米孔的直径增加,孔密度减小.随着氧化时间的延长,TiOO2和Al2O3多孔膜厚度增加,到一定时间后膜厚不变.同时讨论了阳极氧化机理,无论是制备TiO2还是Al2O3有序多孔阵列,阳极氧化过程主要由3个阶段组成:阻挡层的形成、阻挡层的溶解、多孔层的稳定生长.%TiO2 and Al2O3 ordered nanopore arrays have been prepared by two-step anodizition. The structures and morphologies of TiO2 and Al2O3 ordered nanopore arrays were characterized by X-ray diffraction(XRD), field emission scanning electron microscope(FESEM), optical microscope. The results show that the diameters of TiO2 and Al2O3 ordered nanopore arrays increase with the anodized votage. The thicknesses of TiO2 and Al2O3 ordered nanopore arrays increase with extending the anodizing time in a certain range of anodizing time. Furthermore, the mechanism of the anodic oxidation process was discussed. No matter the fabrication of TiO2 or Al2O3 ordered nanopore arrays, the anodic oxidation process consists of three most important stages: formation of barrier layer, dissolution of barrier layer and stable growth of porous layer.