造渣精炼去除多晶硅中B杂质的研究

摘要

On the basis of existing achievements and with the aid of thermodynamics and kinetics analysis, the principle, influencing factors as well as development status of slag refining for removal of boron impurity from poly-crystalline silicon are reviewed, and a summary of existing research results is given, providing theoretical basis for further study.%以现有实验成果为基础,采用相关热力学及动力学分析,综述了造渣精炼去除多晶硅中B杂质的原理、影响因素及发展现状,总结了国内外已有研究结果,为进一步研究提供了理论依据.