物理气相沉积在耐腐蚀涂层中的应用

摘要

PVD（物理气相沉积）作为一种新型绿色的镀膜技术，由于涂层具备硬度高、耐磨性好、摩擦系数低、化学性能稳定、耐热耐氧化的特点，使其在机械、电子和光学行业得到广泛应用。近些年来随着 PVD 技术应用领域的不断扩展，对涂层的性能提出了更高要求，在保障力学性能的同时，如何提高涂层耐蚀性成为研究热点。概述了PVD 技术应用于材料防腐的相关研究，综述了 PVD 涂层的成分、结构与耐蚀行为的关系，同时分别阐述了在 PVD技术中提高涂层耐蚀性能的方法与机理。%As a new green coating technology,physical vapor deposition (PVD)processes have been widely ap-plied to thin film deposition nowadays in mechanic,electronic and optics industries due to its merits of high hardness, wear resistance,low friction coefficient,chemical stability and thermal oxidation resistance of the deposited coatings. In recent years,with the continuous expansion of PVD technology applications,higher requirements for the perfor-mance of the coatings have arose,and how to improve the corrosion resistance while ensuring the mechanical proper-ties of the coating has become a hot topic.The paper outlines the application of PVD in anti-corrosion materials,re-views the relationship between growth characteristics,component and corrosion behaviors,and respectively expounds the improving methods and mechanisms of corrosion resistance of the coating in the PVD technology.