磁控溅射高温固体自润滑涂层的研究与进展∗

摘要

近年来，高温固体自润滑涂层在许多领域得到了快速发展，尤其是磁控溅射技术制备的微纳米高温固体自润滑涂层可以满足航空领域应用中对涂层厚度、力学性能、摩擦性能的更高要求。在综合国内外大量文献的基础上，对磁控溅射方法制备的高温固体自润滑涂层的材料体系、工艺参数优化和涂层结构设计取得的进展进行了综述，通过分析涂层组成相影响机理、工艺改进措施和涂层复杂界面结构，提出未来高温固体自润滑涂层有待进一步研究的问题。%In recent years,high temperature solid self-lubricanting coating has been developed rapidly in many fields.Micro-nano scale high temperature solid self-lubricanting coating prepared by magnetron sputtering technology can meet the requirements of coating thickness,mechanical properties and friction performance for aeronautical applications.On the basis of consulting a large amount of references at home and abroad,progress of corresponding material systems,optimization of magnetron sputtering process parameters and coating structure design for the high temperature solid self-lubricating coating were reviewed.By analyzing the inf-luential mechanism of coating composition,process improvement measures and complex interface structure,the problem of further research of high temperature solid self lubricant coating was put forward.